Resolution:

0,1 µm / 0,5 µm / 1,0 µm

Measuring length:

120 mm - 2.270 mm

Accuracy:

+/- 3 µm / +/- 5 µm

Output signal:

A/B quadrature output and zero point signal by differential line driver

Protection class:

IP53

Discontinued:

- December 2006 -

Advice: